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arsenic antimony phosphorous in uzbekistan

arsenic antimony phosphorous in uzbekistan

articleosti6466748 title Antimony arsenic phosphorus and boron autodoping in silicon epitaxy author Graef M WM and de Moor H HC and Leunissen B JH abstractNote Lateral autodoping is encountered if silicon wafers with heavily doped areas are subjected to silicon epitaxy The characteristics of the autodoping profile are determined by the preepitaxial bake

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